Working Principle of Manual Probe Stations

A probe bench is a device used for testing the electrical parameters of semiconductor chips.probe test system It is capable of adsorbing chips of various specifications and is equipped with multiple adjustable test pins and probe holders. Through the measurement equipment, the measurement of voltage, current, resistance and capacitance-voltage characteristic curves of integrated circuits can be accomplished. The platform is suitable for chip scientific research and analysis, sampling test and so on.

The probe stage is used as follows:

First, load the sample into the vacuum chuck and turn on the vacuum valve control switch so that the sample is firmly adsorbed on the chuck.

Then, use the chuck's X-axis/Y-axis control knob to move the chuck stage so that the sample is clearly displayed under the focus of the microscope's low-power objective lens.

Next, the chuck platform is moved using the chuck's X-axis/Y-axis control knob to move the sample-to-be-tested point under the microscope.

Then, switch the microscope to a high magnification objective and locate the point to be tested at high magnification. Fine-tune the focus of the microscope and the x-y position of the sample so that the image is clearly visible and the test point is placed in the center of the microscope's field of view.

After confirming the position of the measuring point, the position of the probe holder needs to be adjusted. After installing the probe,RF probes first move the probe to a position close to the point to be measured, then slowly adjust the X, Y, Z fine-tuning knobs on the probe holder and carefully move the probe to the point to be measured. In the process of moving slowly and carefully to avoid accidental injury to the chip. When the tip of the probe is hanging over the measured point, you can move it back a little and then use the Z-axis knob to lower the probe. Finally, use the X-axis knob to slide the probe from side to side and look for scratches to determine if it has made contact with the DUT.

After ensuring that the tip of the needle has made good contact with the point under test, you can begin testing by connecting the test equipment.

The following points need to be noted for maintenance and care:

1. Avoid collisions: When installing and operating the CS Probe Station, collisions should be avoided. The machine should be placed flat and should not be tilted or inverted horizontally to avoid malfunction or abnormal noise.

2. Instrument Transportation: When transporting the instrument, unplug the power cord first. Use a special packing box for transportation and avoid touching any moving parts of the probe table.

3. Instrument storage: Pay attention to keep clean after use, try to blow the dust dry, so as not to contaminate the mechanical precision parts, optical parts and electrical contact surfaces with dust, which will lead to a reduction in the accuracy of the instrument. When cleaning the probe body, avoid splashing water directly to clean,probe card use a dust-free cloth to gently wipe and blow dry. Do not touch the machine with hard objects to avoid malfunction or danger. When cleaning the optical parts of the probe table, use lens paper dipped in anhydrous alcohol to gently wipe from the center outward. Pay attention to the safety of using flammable substances of waterless alcohol.

4. Unplug the power cord when power is out or when not in use for a long period of time and when traveling to maintain the life of the machine.

In order to ensure the accuracy of the data and the normal use of the instrument, the operator must operate in strict accordance with the requirements.

5. Working environment: The probe table should be placed on a stable and reliable table, preferably one with anti-vibration device, and avoid using it in high temperature, humidity, violent vibration, direct sunlight and dusty environment. The optimum temperature range is between 5°C and 40°C, and the optimum humidity range is 40% to 85%. If the air humidity is lower than 30%, the humidity can be controlled by a reliable humidity controller to keep it in the range of 50% to 60%. Doors and windows should be closed as much as possible when in use to achieve the effect of dehumidification.

Using power supply: 220±10%, 50~60Hz